10/3/2010	12:24:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	12:25:01 AM	Recipe started at 12:24 AM
10/3/2010	12:25:01 AM	Helium valve closed
10/3/2010	12:25:01 AM	H2 valve closed
10/3/2010	12:25:01 AM	BCl3 valve closed
10/3/2010	12:25:01 AM	PH3 valve closed
10/3/2010	12:25:01 AM	SiCl4 pre valve closed
10/3/2010	12:25:01 AM	SiCl4 post valve closed
10/3/2010	12:25:01 AM	Main Vac valve closed
10/3/2010	12:25:01 AM	Bubbler valve closed
10/3/2010	12:25:01 AM	Bypass valve opened
10/3/2010	12:25:01 AM	Helium MFC set to  0.000000
10/3/2010	12:25:01 AM	H2 MFC set to  0.000000
10/3/2010	12:25:01 AM	BCl3 MFC set to  0.000000
10/3/2010	12:25:01 AM	PHl3 MFC set to  0.000000
10/3/2010	12:25:01 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:25:01 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:25:02 AM	Tube furnace set to 0
10/3/2010	12:25:02 AM	Helium valve closed
10/3/2010	12:25:02 AM	H2 valve closed
10/3/2010	12:25:02 AM	BCl3 valve closed
10/3/2010	12:25:02 AM	PH3 valve closed
10/3/2010	12:25:02 AM	SiCl4 pre valve closed
10/3/2010	12:25:02 AM	SiCl4 post valve closed
10/3/2010	12:25:02 AM	Bubbler valve closed
10/3/2010	12:25:02 AM	Main Vac valve opened
10/3/2010	12:25:02 AM	Bypass valve opened
10/3/2010	12:25:02 AM	Helium MFC set to  0.000000
10/3/2010	12:25:02 AM	H2 MFC set to  0.000000
10/3/2010	12:25:02 AM	BCl3 MFC set to  0.000000
10/3/2010	12:25:02 AM	PHl3 MFC set to  0.000000
10/3/2010	12:25:02 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:25:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:25:02 AM	Tube furnace set to 0
10/3/2010	12:26:02 AM	H2 valve closed
10/3/2010	12:26:02 AM	BCl3 valve closed
10/3/2010	12:26:02 AM	PH3 valve closed
10/3/2010	12:26:02 AM	SiCl4 pre valve closed
10/3/2010	12:26:02 AM	SiCl4 post valve closed
10/3/2010	12:26:02 AM	Bubbler valve closed
10/3/2010	12:26:02 AM	Helium valve opened
10/3/2010	12:26:02 AM	Main Vac valve opened
10/3/2010	12:26:02 AM	Bypass valve opened
10/3/2010	12:26:02 AM	Helium MFC set to  100.000000
10/3/2010	12:26:02 AM	H2 MFC set to  0.000000
10/3/2010	12:26:02 AM	BCl3 MFC set to  0.000000
10/3/2010	12:26:02 AM	PHl3 MFC set to  0.000000
10/3/2010	12:26:02 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:26:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:26:02 AM	Tube furnace set to 0
10/3/2010	12:27:02 AM	Helium valve closed
10/3/2010	12:27:02 AM	H2 valve closed
10/3/2010	12:27:02 AM	BCl3 valve closed
10/3/2010	12:27:02 AM	PH3 valve closed
10/3/2010	12:27:02 AM	SiCl4 pre valve closed
10/3/2010	12:27:02 AM	SiCl4 post valve closed
10/3/2010	12:27:02 AM	Bubbler valve closed
10/3/2010	12:27:02 AM	Main Vac valve opened
10/3/2010	12:27:02 AM	Bypass valve opened
10/3/2010	12:27:02 AM	Helium MFC set to  0.000000
10/3/2010	12:27:02 AM	H2 MFC set to  0.000000
10/3/2010	12:27:02 AM	BCl3 MFC set to  0.000000
10/3/2010	12:27:02 AM	PHl3 MFC set to  0.000000
10/3/2010	12:27:02 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:27:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:27:02 AM	Tube furnace set to 0
10/3/2010	12:28:02 AM	H2 valve closed
10/3/2010	12:28:02 AM	BCl3 valve closed
10/3/2010	12:28:02 AM	PH3 valve closed
10/3/2010	12:28:02 AM	SiCl4 pre valve closed
10/3/2010	12:28:02 AM	SiCl4 post valve closed
10/3/2010	12:28:02 AM	Bubbler valve closed
10/3/2010	12:28:02 AM	Helium valve opened
10/3/2010	12:28:02 AM	Main Vac valve opened
10/3/2010	12:28:02 AM	Bypass valve opened
10/3/2010	12:28:02 AM	Helium MFC set to  100.000000
10/3/2010	12:28:02 AM	H2 MFC set to  0.000000
10/3/2010	12:28:02 AM	BCl3 MFC set to  0.000000
10/3/2010	12:28:02 AM	PHl3 MFC set to  0.000000
10/3/2010	12:28:02 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:28:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:28:03 AM	Tube furnace set to 0
10/3/2010	12:29:03 AM	Helium valve closed
10/3/2010	12:29:03 AM	H2 valve closed
10/3/2010	12:29:03 AM	BCl3 valve closed
10/3/2010	12:29:03 AM	PH3 valve closed
10/3/2010	12:29:03 AM	SiCl4 pre valve closed
10/3/2010	12:29:03 AM	SiCl4 post valve closed
10/3/2010	12:29:03 AM	Bubbler valve closed
10/3/2010	12:29:03 AM	Main Vac valve opened
10/3/2010	12:29:03 AM	Bypass valve opened
10/3/2010	12:29:03 AM	Helium MFC set to  0.000000
10/3/2010	12:29:03 AM	H2 MFC set to  0.000000
10/3/2010	12:29:03 AM	BCl3 MFC set to  0.000000
10/3/2010	12:29:03 AM	PHl3 MFC set to  0.000000
10/3/2010	12:29:03 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:29:03 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:29:03 AM	Tube furnace set to 0
10/3/2010	12:30:03 AM	H2 valve closed
10/3/2010	12:30:03 AM	BCl3 valve closed
10/3/2010	12:30:03 AM	PH3 valve closed
10/3/2010	12:30:03 AM	SiCl4 pre valve closed
10/3/2010	12:30:03 AM	SiCl4 post valve closed
10/3/2010	12:30:03 AM	Bubbler valve closed
10/3/2010	12:30:03 AM	Helium valve opened
10/3/2010	12:30:03 AM	Main Vac valve opened
10/3/2010	12:30:03 AM	Bypass valve opened
10/3/2010	12:30:03 AM	Helium MFC set to  100.000000
10/3/2010	12:30:03 AM	H2 MFC set to  0.000000
10/3/2010	12:30:03 AM	BCl3 MFC set to  0.000000
10/3/2010	12:30:03 AM	PHl3 MFC set to  0.000000
10/3/2010	12:30:03 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:30:03 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:30:03 AM	Tube furnace set to 0
10/3/2010	12:31:03 AM	Helium valve closed
10/3/2010	12:31:03 AM	H2 valve closed
10/3/2010	12:31:03 AM	BCl3 valve closed
10/3/2010	12:31:03 AM	PH3 valve closed
10/3/2010	12:31:03 AM	SiCl4 pre valve closed
10/3/2010	12:31:03 AM	SiCl4 post valve closed
10/3/2010	12:31:03 AM	Bubbler valve closed
10/3/2010	12:31:03 AM	Main Vac valve opened
10/3/2010	12:31:03 AM	Bypass valve opened
10/3/2010	12:31:03 AM	Helium MFC set to  0.000000
10/3/2010	12:31:03 AM	H2 MFC set to  0.000000
10/3/2010	12:31:03 AM	BCl3 MFC set to  0.000000
10/3/2010	12:31:03 AM	PHl3 MFC set to  0.000000
10/3/2010	12:31:03 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:31:03 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:31:03 AM	Tube furnace set to 0
10/3/2010	12:32:03 AM	H2 valve closed
10/3/2010	12:32:03 AM	BCl3 valve closed
10/3/2010	12:32:03 AM	PH3 valve closed
10/3/2010	12:32:03 AM	SiCl4 pre valve closed
10/3/2010	12:32:03 AM	SiCl4 post valve closed
10/3/2010	12:32:03 AM	Bubbler valve closed
10/3/2010	12:32:03 AM	Helium valve opened
10/3/2010	12:32:03 AM	Main Vac valve opened
10/3/2010	12:32:03 AM	Bypass valve opened
10/3/2010	12:32:03 AM	Helium MFC set to  100.000000
10/3/2010	12:32:03 AM	H2 MFC set to  0.000000
10/3/2010	12:32:03 AM	BCl3 MFC set to  0.000000
10/3/2010	12:32:03 AM	PHl3 MFC set to  0.000000
10/3/2010	12:32:03 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:32:03 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:32:03 AM	Tube furnace set to 0
10/3/2010	12:33:03 AM	Helium valve closed
10/3/2010	12:33:03 AM	H2 valve closed
10/3/2010	12:33:03 AM	BCl3 valve closed
10/3/2010	12:33:03 AM	PH3 valve closed
10/3/2010	12:33:03 AM	SiCl4 pre valve closed
10/3/2010	12:33:03 AM	SiCl4 post valve closed
10/3/2010	12:33:03 AM	Bubbler valve closed
10/3/2010	12:33:03 AM	Main Vac valve opened
10/3/2010	12:33:03 AM	Bypass valve opened
10/3/2010	12:33:04 AM	Helium MFC set to  0.000000
10/3/2010	12:33:04 AM	H2 MFC set to  0.000000
10/3/2010	12:33:04 AM	BCl3 MFC set to  0.000000
10/3/2010	12:33:04 AM	PHl3 MFC set to  0.000000
10/3/2010	12:33:04 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:33:04 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:33:04 AM	Tube furnace set to 0
10/3/2010	12:34:04 AM	H2 valve closed
10/3/2010	12:34:04 AM	BCl3 valve closed
10/3/2010	12:34:04 AM	PH3 valve closed
10/3/2010	12:34:04 AM	SiCl4 pre valve closed
10/3/2010	12:34:04 AM	SiCl4 post valve closed
10/3/2010	12:34:04 AM	Bubbler valve closed
10/3/2010	12:34:04 AM	Helium valve opened
10/3/2010	12:34:04 AM	Main Vac valve opened
10/3/2010	12:34:04 AM	Bypass valve opened
10/3/2010	12:34:04 AM	Helium MFC set to  100.000000
10/3/2010	12:34:04 AM	H2 MFC set to  0.000000
10/3/2010	12:34:04 AM	BCl3 MFC set to  0.000000
10/3/2010	12:34:04 AM	PHl3 MFC set to  0.000000
10/3/2010	12:34:04 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:34:04 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:34:04 AM	Tube furnace set to 0
10/3/2010	12:35:04 AM	Helium valve closed
10/3/2010	12:35:04 AM	H2 valve closed
10/3/2010	12:35:04 AM	BCl3 valve closed
10/3/2010	12:35:04 AM	PH3 valve closed
10/3/2010	12:35:04 AM	SiCl4 pre valve closed
10/3/2010	12:35:04 AM	SiCl4 post valve closed
10/3/2010	12:35:04 AM	Bubbler valve closed
10/3/2010	12:35:04 AM	Main Vac valve opened
10/3/2010	12:35:04 AM	Bypass valve opened
10/3/2010	12:35:04 AM	Helium MFC set to  0.000000
10/3/2010	12:35:04 AM	H2 MFC set to  0.000000
10/3/2010	12:35:04 AM	BCl3 MFC set to  0.000000
10/3/2010	12:35:04 AM	PHl3 MFC set to  0.000000
10/3/2010	12:35:04 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:35:04 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:35:04 AM	Tube furnace set to 0
10/3/2010	12:36:04 AM	H2 valve closed
10/3/2010	12:36:04 AM	BCl3 valve closed
10/3/2010	12:36:04 AM	PH3 valve closed
10/3/2010	12:36:04 AM	SiCl4 pre valve closed
10/3/2010	12:36:04 AM	SiCl4 post valve closed
10/3/2010	12:36:04 AM	Bubbler valve closed
10/3/2010	12:36:04 AM	Helium valve opened
10/3/2010	12:36:04 AM	Main Vac valve opened
10/3/2010	12:36:04 AM	Bypass valve opened
10/3/2010	12:36:04 AM	Helium MFC set to  100.000000
10/3/2010	12:36:04 AM	H2 MFC set to  0.000000
10/3/2010	12:36:04 AM	BCl3 MFC set to  0.000000
10/3/2010	12:36:04 AM	PHl3 MFC set to  0.000000
10/3/2010	12:36:04 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:36:04 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:36:04 AM	Tube furnace set to 0
10/3/2010	12:37:04 AM	Helium valve closed
10/3/2010	12:37:04 AM	H2 valve closed
10/3/2010	12:37:04 AM	BCl3 valve closed
10/3/2010	12:37:04 AM	PH3 valve closed
10/3/2010	12:37:04 AM	SiCl4 pre valve closed
10/3/2010	12:37:04 AM	SiCl4 post valve closed
10/3/2010	12:37:04 AM	Bubbler valve closed
10/3/2010	12:37:04 AM	Main Vac valve opened
10/3/2010	12:37:04 AM	Bypass valve opened
10/3/2010	12:37:04 AM	Helium MFC set to  0.000000
10/3/2010	12:37:04 AM	H2 MFC set to  0.000000
10/3/2010	12:37:04 AM	BCl3 MFC set to  0.000000
10/3/2010	12:37:04 AM	PHl3 MFC set to  0.000000
10/3/2010	12:37:04 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:37:04 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:37:05 AM	Tube furnace set to 0
10/3/2010	12:38:05 AM	H2 valve closed
10/3/2010	12:38:05 AM	BCl3 valve closed
10/3/2010	12:38:05 AM	PH3 valve closed
10/3/2010	12:38:05 AM	SiCl4 pre valve closed
10/3/2010	12:38:05 AM	SiCl4 post valve closed
10/3/2010	12:38:05 AM	Bubbler valve closed
10/3/2010	12:38:05 AM	Helium valve opened
10/3/2010	12:38:05 AM	Main Vac valve opened
10/3/2010	12:38:05 AM	Bypass valve opened
10/3/2010	12:38:05 AM	Helium MFC set to  100.000000
10/3/2010	12:38:05 AM	H2 MFC set to  0.000000
10/3/2010	12:38:05 AM	BCl3 MFC set to  0.000000
10/3/2010	12:38:05 AM	PHl3 MFC set to  0.000000
10/3/2010	12:38:05 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:38:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:38:05 AM	Tube furnace set to 0
10/3/2010	12:39:05 AM	Helium valve closed
10/3/2010	12:39:05 AM	H2 valve closed
10/3/2010	12:39:05 AM	BCl3 valve closed
10/3/2010	12:39:05 AM	PH3 valve closed
10/3/2010	12:39:05 AM	SiCl4 pre valve closed
10/3/2010	12:39:05 AM	SiCl4 post valve closed
10/3/2010	12:39:05 AM	Bubbler valve closed
10/3/2010	12:39:05 AM	Main Vac valve opened
10/3/2010	12:39:05 AM	Bypass valve opened
10/3/2010	12:39:05 AM	Helium MFC set to  0.000000
10/3/2010	12:39:05 AM	H2 MFC set to  0.000000
10/3/2010	12:39:05 AM	BCl3 MFC set to  0.000000
10/3/2010	12:39:05 AM	PHl3 MFC set to  0.000000
10/3/2010	12:39:05 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:39:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:39:05 AM	Tube furnace set to 0
10/3/2010	12:40:05 AM	H2 valve closed
10/3/2010	12:40:05 AM	BCl3 valve closed
10/3/2010	12:40:05 AM	PH3 valve closed
10/3/2010	12:40:05 AM	SiCl4 pre valve closed
10/3/2010	12:40:05 AM	SiCl4 post valve closed
10/3/2010	12:40:05 AM	Bubbler valve closed
10/3/2010	12:40:05 AM	Helium valve opened
10/3/2010	12:40:05 AM	Main Vac valve opened
10/3/2010	12:40:05 AM	Bypass valve opened
10/3/2010	12:40:05 AM	Helium MFC set to  100.000000
10/3/2010	12:40:05 AM	H2 MFC set to  0.000000
10/3/2010	12:40:05 AM	BCl3 MFC set to  0.000000
10/3/2010	12:40:05 AM	PHl3 MFC set to  0.000000
10/3/2010	12:40:05 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:40:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:40:05 AM	Tube furnace set to 0
10/3/2010	12:41:05 AM	Helium valve closed
10/3/2010	12:41:05 AM	H2 valve closed
10/3/2010	12:41:05 AM	BCl3 valve closed
10/3/2010	12:41:05 AM	PH3 valve closed
10/3/2010	12:41:05 AM	SiCl4 pre valve closed
10/3/2010	12:41:05 AM	SiCl4 post valve closed
10/3/2010	12:41:05 AM	Bubbler valve closed
10/3/2010	12:41:05 AM	Main Vac valve opened
10/3/2010	12:41:05 AM	Bypass valve opened
10/3/2010	12:41:05 AM	Helium MFC set to  0.000000
10/3/2010	12:41:05 AM	H2 MFC set to  0.000000
10/3/2010	12:41:05 AM	BCl3 MFC set to  0.000000
10/3/2010	12:41:05 AM	PHl3 MFC set to  0.000000
10/3/2010	12:41:05 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:41:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:41:05 AM	Tube furnace set to 0
10/3/2010	12:42:05 AM	H2 valve closed
10/3/2010	12:42:05 AM	BCl3 valve closed
10/3/2010	12:42:05 AM	PH3 valve closed
10/3/2010	12:42:05 AM	SiCl4 pre valve closed
10/3/2010	12:42:05 AM	SiCl4 post valve closed
10/3/2010	12:42:05 AM	Bubbler valve closed
10/3/2010	12:42:05 AM	Helium valve opened
10/3/2010	12:42:05 AM	Main Vac valve opened
10/3/2010	12:42:05 AM	Bypass valve opened
10/3/2010	12:42:05 AM	Helium MFC set to  100.000000
10/3/2010	12:42:05 AM	H2 MFC set to  0.000000
10/3/2010	12:42:05 AM	BCl3 MFC set to  0.000000
10/3/2010	12:42:05 AM	PHl3 MFC set to  0.000000
10/3/2010	12:42:05 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:42:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:42:06 AM	Tube furnace set to 0
10/3/2010	12:43:06 AM	Helium valve closed
10/3/2010	12:43:06 AM	H2 valve closed
10/3/2010	12:43:06 AM	BCl3 valve closed
10/3/2010	12:43:06 AM	PH3 valve closed
10/3/2010	12:43:06 AM	SiCl4 pre valve closed
10/3/2010	12:43:06 AM	SiCl4 post valve closed
10/3/2010	12:43:06 AM	Bubbler valve closed
10/3/2010	12:43:06 AM	Main Vac valve opened
10/3/2010	12:43:06 AM	Bypass valve opened
10/3/2010	12:43:06 AM	Helium MFC set to  0.000000
10/3/2010	12:43:06 AM	H2 MFC set to  0.000000
10/3/2010	12:43:06 AM	BCl3 MFC set to  0.000000
10/3/2010	12:43:06 AM	PHl3 MFC set to  0.000000
10/3/2010	12:43:06 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:43:06 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:43:06 AM	Tube furnace set to 0
10/3/2010	12:44:06 AM	H2 valve closed
10/3/2010	12:44:06 AM	BCl3 valve closed
10/3/2010	12:44:06 AM	PH3 valve closed
10/3/2010	12:44:06 AM	SiCl4 pre valve closed
10/3/2010	12:44:06 AM	SiCl4 post valve closed
10/3/2010	12:44:06 AM	Bubbler valve closed
10/3/2010	12:44:06 AM	Helium valve opened
10/3/2010	12:44:06 AM	Main Vac valve opened
10/3/2010	12:44:06 AM	Bypass valve opened
10/3/2010	12:44:06 AM	Helium MFC set to  100.000000
10/3/2010	12:44:06 AM	H2 MFC set to  0.000000
10/3/2010	12:44:06 AM	BCl3 MFC set to  0.000000
10/3/2010	12:44:06 AM	PHl3 MFC set to  0.000000
10/3/2010	12:44:06 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:44:06 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:44:06 AM	Tube furnace set to 0
10/3/2010	12:45:06 AM	Helium valve closed
10/3/2010	12:45:06 AM	H2 valve closed
10/3/2010	12:45:06 AM	BCl3 valve closed
10/3/2010	12:45:06 AM	PH3 valve closed
10/3/2010	12:45:06 AM	SiCl4 pre valve closed
10/3/2010	12:45:06 AM	SiCl4 post valve closed
10/3/2010	12:45:06 AM	Bubbler valve closed
10/3/2010	12:45:06 AM	Main Vac valve opened
10/3/2010	12:45:06 AM	Bypass valve opened
10/3/2010	12:45:06 AM	Helium MFC set to  0.000000
10/3/2010	12:45:06 AM	H2 MFC set to  0.000000
10/3/2010	12:45:06 AM	BCl3 MFC set to  0.000000
10/3/2010	12:45:06 AM	PHl3 MFC set to  0.000000
10/3/2010	12:45:06 AM	SiCl4 MFC set to  0.000000
10/3/2010	12:45:06 AM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:45:06 AM	Tube furnace set to 0
10/3/2010	12:45:07 AM	Run finished at 12:45 AM
10/3/2010	12:45:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	12:25:06 PM	Recipe started at 12:25 PM
10/3/2010	12:25:06 PM	Helium valve closed
10/3/2010	12:25:06 PM	BCl3 valve closed
10/3/2010	12:25:06 PM	PH3 valve closed
10/3/2010	12:25:06 PM	SiCl4 pre valve closed
10/3/2010	12:25:06 PM	SiCl4 post valve closed
10/3/2010	12:25:06 PM	Main Vac valve closed
10/3/2010	12:25:06 PM	Bypass valve closed
10/3/2010	12:25:06 PM	Bubbler valve closed
10/3/2010	12:25:06 PM	H2 valve opened
10/3/2010	12:25:06 PM	Helium MFC set to  0.000000
10/3/2010	12:25:06 PM	H2 MFC set to  500.000000
10/3/2010	12:25:06 PM	BCl3 MFC set to  0.000000
10/3/2010	12:25:06 PM	PHl3 MFC set to  0.000000
10/3/2010	12:25:06 PM	SiCl4 MFC set to  0.000000
10/3/2010	12:25:06 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:25:07 PM	Tube furnace set to 1000
10/3/2010	12:26:28 PM	Helium valve closed
10/3/2010	12:26:28 PM	BCl3 valve closed
10/3/2010	12:26:28 PM	PH3 valve closed
10/3/2010	12:26:28 PM	SiCl4 pre valve closed
10/3/2010	12:26:28 PM	SiCl4 post valve closed
10/3/2010	12:26:28 PM	Main Vac valve closed
10/3/2010	12:26:28 PM	Bypass valve closed
10/3/2010	12:26:28 PM	H2 valve opened
10/3/2010	12:26:28 PM	Bubbler valve opened
10/3/2010	12:26:28 PM	Helium MFC set to  0.000000
10/3/2010	12:26:28 PM	H2 MFC set to  500.000000
10/3/2010	12:26:28 PM	BCl3 MFC set to  0.000000
10/3/2010	12:26:28 PM	PHl3 MFC set to  0.000000
10/3/2010	12:26:28 PM	SiCl4 MFC set to  0.000000
10/3/2010	12:26:28 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:26:28 PM	Tube furnace set to 1000
10/3/2010	12:46:28 PM	Helium valve closed
10/3/2010	12:46:28 PM	PH3 valve closed
10/3/2010	12:46:28 PM	Main Vac valve closed
10/3/2010	12:46:28 PM	Bypass valve closed
10/3/2010	12:46:28 PM	H2 valve opened
10/3/2010	12:46:28 PM	BCl3 valve opened
10/3/2010	12:46:28 PM	SiCl4 pre valve opened
10/3/2010	12:46:28 PM	SiCl4 post valve opened
10/3/2010	12:46:28 PM	Bubbler valve opened
10/3/2010	12:46:28 PM	Helium MFC set to  0.000000
10/3/2010	12:46:28 PM	H2 MFC set to  500.000000
10/3/2010	12:46:28 PM	BCl3 MFC set to  10.000000
10/3/2010	12:46:28 PM	PHl3 MFC set to  0.000000
10/3/2010	12:46:28 PM	SiCl4 MFC set to  50.000000
10/3/2010	12:46:28 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:46:28 PM	Tube furnace set to 1000
10/3/2010	12:58:28 PM	Helium valve closed
10/3/2010	12:58:28 PM	BCl3 valve closed
10/3/2010	12:58:28 PM	PH3 valve closed
10/3/2010	12:58:28 PM	SiCl4 pre valve closed
10/3/2010	12:58:28 PM	SiCl4 post valve closed
10/3/2010	12:58:28 PM	Main Vac valve closed
10/3/2010	12:58:28 PM	Bypass valve closed
10/3/2010	12:58:28 PM	H2 valve opened
10/3/2010	12:58:28 PM	Bubbler valve opened
10/3/2010	12:58:28 PM	Helium MFC set to  0.000000
10/3/2010	12:58:28 PM	H2 MFC set to  500.000000
10/3/2010	12:58:28 PM	BCl3 MFC set to  0.000000
10/3/2010	12:58:28 PM	PHl3 MFC set to  0.000000
10/3/2010	12:58:28 PM	SiCl4 MFC set to  0.000000
10/3/2010	12:58:28 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	12:58:29 PM	Tube furnace set to 750
10/3/2010	1:03:15 PM	H2 valve closed
10/3/2010	1:03:15 PM	BCl3 valve closed
10/3/2010	1:03:15 PM	PH3 valve closed
10/3/2010	1:03:15 PM	SiCl4 pre valve closed
10/3/2010	1:03:15 PM	SiCl4 post valve closed
10/3/2010	1:03:15 PM	Main Vac valve closed
10/3/2010	1:03:15 PM	Bypass valve closed
10/3/2010	1:03:15 PM	Helium valve opened
10/3/2010	1:03:15 PM	Bubbler valve opened
10/3/2010	1:03:15 PM	Helium MFC set to  500.000000
10/3/2010	1:03:15 PM	H2 MFC set to  0.000000
10/3/2010	1:03:15 PM	BCl3 MFC set to  0.000000
10/3/2010	1:03:15 PM	PHl3 MFC set to  0.000000
10/3/2010	1:03:15 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:03:15 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:03:15 PM	Tube furnace set to 0
10/3/2010	1:23:15 PM	Helium valve closed
10/3/2010	1:23:15 PM	H2 valve closed
10/3/2010	1:23:15 PM	BCl3 valve closed
10/3/2010	1:23:15 PM	PH3 valve closed
10/3/2010	1:23:15 PM	SiCl4 pre valve closed
10/3/2010	1:23:15 PM	SiCl4 post valve closed
10/3/2010	1:23:15 PM	Main Vac valve closed
10/3/2010	1:23:15 PM	Bypass valve closed
10/3/2010	1:23:15 PM	Bubbler valve closed
10/3/2010	1:23:15 PM	Helium MFC set to  0.000000
10/3/2010	1:23:15 PM	H2 MFC set to  0.000000
10/3/2010	1:23:15 PM	BCl3 MFC set to  0.000000
10/3/2010	1:23:15 PM	PHl3 MFC set to  0.000000
10/3/2010	1:23:15 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:23:15 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:23:15 PM	Tube furnace set to 0
10/3/2010	1:23:15 PM	Run finished at 1:23 PM
10/3/2010	1:42:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2010	1:42:39 PM	Recipe started at 1:42 PM
10/3/2010	1:42:39 PM	H2 valve closed
10/3/2010	1:42:39 PM	BCl3 valve closed
10/3/2010	1:42:39 PM	PH3 valve closed
10/3/2010	1:42:39 PM	SiCl4 pre valve closed
10/3/2010	1:42:39 PM	SiCl4 post valve closed
10/3/2010	1:42:39 PM	Main Vac valve closed
10/3/2010	1:42:39 PM	Bypass valve closed
10/3/2010	1:42:39 PM	Bubbler valve closed
10/3/2010	1:42:39 PM	Helium valve opened
10/3/2010	1:42:39 PM	Helium MFC set to  500.000000
10/3/2010	1:42:39 PM	H2 MFC set to  0.000000
10/3/2010	1:42:39 PM	BCl3 MFC set to  0.000000
10/3/2010	1:42:39 PM	PHl3 MFC set to  0.000000
10/3/2010	1:42:39 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:42:39 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:42:39 PM	Tube furnace set to 0
10/3/2010	1:42:40 PM	Helium valve closed
10/3/2010	1:42:40 PM	H2 valve closed
10/3/2010	1:42:40 PM	BCl3 valve closed
10/3/2010	1:42:40 PM	PH3 valve closed
10/3/2010	1:42:40 PM	SiCl4 pre valve closed
10/3/2010	1:42:40 PM	SiCl4 post valve closed
10/3/2010	1:42:40 PM	Main Vac valve closed
10/3/2010	1:42:40 PM	Bypass valve closed
10/3/2010	1:42:40 PM	Bubbler valve closed
10/3/2010	1:42:40 PM	Helium MFC set to  0.000000
10/3/2010	1:42:40 PM	H2 MFC set to  0.000000
10/3/2010	1:42:40 PM	BCl3 MFC set to  0.000000
10/3/2010	1:42:40 PM	PHl3 MFC set to  0.000000
10/3/2010	1:42:40 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:42:40 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:42:40 PM	Tube furnace set to 0
10/3/2010	1:42:40 PM	Run finished at 1:42 PM
10/3/2010	1:42:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2010	1:54:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	1:54:06 PM	Recipe started at 1:54 PM
10/3/2010	1:54:06 PM	Helium valve closed
10/3/2010	1:54:06 PM	H2 valve closed
10/3/2010	1:54:06 PM	BCl3 valve closed
10/3/2010	1:54:06 PM	PH3 valve closed
10/3/2010	1:54:06 PM	SiCl4 pre valve closed
10/3/2010	1:54:06 PM	SiCl4 post valve closed
10/3/2010	1:54:06 PM	Main Vac valve closed
10/3/2010	1:54:06 PM	Bubbler valve closed
10/3/2010	1:54:06 PM	Bypass valve opened
10/3/2010	1:54:06 PM	Helium MFC set to  0.000000
10/3/2010	1:54:06 PM	H2 MFC set to  0.000000
10/3/2010	1:54:06 PM	BCl3 MFC set to  0.000000
10/3/2010	1:54:06 PM	PHl3 MFC set to  0.000000
10/3/2010	1:54:06 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:54:06 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:54:06 PM	Tube furnace set to 0
10/3/2010	1:54:53 PM	Helium valve closed
10/3/2010	1:54:53 PM	H2 valve closed
10/3/2010	1:54:53 PM	BCl3 valve closed
10/3/2010	1:54:53 PM	PH3 valve closed
10/3/2010	1:54:53 PM	SiCl4 pre valve closed
10/3/2010	1:54:53 PM	SiCl4 post valve closed
10/3/2010	1:54:53 PM	Bubbler valve closed
10/3/2010	1:54:53 PM	Main Vac valve opened
10/3/2010	1:54:53 PM	Bypass valve opened
10/3/2010	1:54:53 PM	Helium MFC set to  0.000000
10/3/2010	1:54:53 PM	H2 MFC set to  0.000000
10/3/2010	1:54:53 PM	BCl3 MFC set to  0.000000
10/3/2010	1:54:53 PM	PHl3 MFC set to  0.000000
10/3/2010	1:54:53 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:54:53 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:54:53 PM	Tube furnace set to 0
10/3/2010	1:54:53 PM	Run finished at 1:54 PM
10/3/2010	1:54:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	1:54:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	1:55:11 PM	Recipe started at 1:55 PM
10/3/2010	1:55:11 PM	Helium valve closed
10/3/2010	1:55:11 PM	H2 valve closed
10/3/2010	1:55:11 PM	BCl3 valve closed
10/3/2010	1:55:11 PM	PH3 valve closed
10/3/2010	1:55:11 PM	SiCl4 pre valve closed
10/3/2010	1:55:11 PM	SiCl4 post valve closed
10/3/2010	1:55:11 PM	Main Vac valve closed
10/3/2010	1:55:11 PM	Bubbler valve closed
10/3/2010	1:55:11 PM	Bypass valve opened
10/3/2010	1:55:11 PM	Helium MFC set to  0.000000
10/3/2010	1:55:11 PM	H2 MFC set to  0.000000
10/3/2010	1:55:11 PM	BCl3 MFC set to  0.000000
10/3/2010	1:55:11 PM	PHl3 MFC set to  0.000000
10/3/2010	1:55:11 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:55:11 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:55:11 PM	Tube furnace set to 0
10/3/2010	1:55:11 PM	Helium valve closed
10/3/2010	1:55:11 PM	H2 valve closed
10/3/2010	1:55:11 PM	BCl3 valve closed
10/3/2010	1:55:11 PM	PH3 valve closed
10/3/2010	1:55:11 PM	SiCl4 pre valve closed
10/3/2010	1:55:11 PM	SiCl4 post valve closed
10/3/2010	1:55:11 PM	Bubbler valve closed
10/3/2010	1:55:11 PM	Main Vac valve opened
10/3/2010	1:55:11 PM	Bypass valve opened
10/3/2010	1:55:11 PM	Helium MFC set to  0.000000
10/3/2010	1:55:11 PM	H2 MFC set to  0.000000
10/3/2010	1:55:11 PM	BCl3 MFC set to  0.000000
10/3/2010	1:55:11 PM	PHl3 MFC set to  0.000000
10/3/2010	1:55:11 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:55:11 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:55:11 PM	Tube furnace set to 0
10/3/2010	1:56:11 PM	H2 valve closed
10/3/2010	1:56:11 PM	BCl3 valve closed
10/3/2010	1:56:11 PM	PH3 valve closed
10/3/2010	1:56:11 PM	SiCl4 pre valve closed
10/3/2010	1:56:11 PM	SiCl4 post valve closed
10/3/2010	1:56:11 PM	Bubbler valve closed
10/3/2010	1:56:11 PM	Helium valve opened
10/3/2010	1:56:11 PM	Main Vac valve opened
10/3/2010	1:56:11 PM	Bypass valve opened
10/3/2010	1:56:11 PM	Helium MFC set to  100.000000
10/3/2010	1:56:11 PM	H2 MFC set to  0.000000
10/3/2010	1:56:11 PM	BCl3 MFC set to  0.000000
10/3/2010	1:56:11 PM	PHl3 MFC set to  0.000000
10/3/2010	1:56:11 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:56:11 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:56:11 PM	Tube furnace set to 0
10/3/2010	1:57:11 PM	Helium valve closed
10/3/2010	1:57:11 PM	H2 valve closed
10/3/2010	1:57:11 PM	BCl3 valve closed
10/3/2010	1:57:11 PM	PH3 valve closed
10/3/2010	1:57:11 PM	SiCl4 pre valve closed
10/3/2010	1:57:11 PM	SiCl4 post valve closed
10/3/2010	1:57:11 PM	Bubbler valve closed
10/3/2010	1:57:11 PM	Main Vac valve opened
10/3/2010	1:57:11 PM	Bypass valve opened
10/3/2010	1:57:11 PM	Helium MFC set to  0.000000
10/3/2010	1:57:11 PM	H2 MFC set to  0.000000
10/3/2010	1:57:11 PM	BCl3 MFC set to  0.000000
10/3/2010	1:57:11 PM	PHl3 MFC set to  0.000000
10/3/2010	1:57:11 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:57:11 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:57:12 PM	Tube furnace set to 0
10/3/2010	1:58:12 PM	H2 valve closed
10/3/2010	1:58:12 PM	BCl3 valve closed
10/3/2010	1:58:12 PM	PH3 valve closed
10/3/2010	1:58:12 PM	SiCl4 pre valve closed
10/3/2010	1:58:12 PM	SiCl4 post valve closed
10/3/2010	1:58:12 PM	Bubbler valve closed
10/3/2010	1:58:12 PM	Helium valve opened
10/3/2010	1:58:12 PM	Main Vac valve opened
10/3/2010	1:58:12 PM	Bypass valve opened
10/3/2010	1:58:12 PM	Helium MFC set to  100.000000
10/3/2010	1:58:12 PM	H2 MFC set to  0.000000
10/3/2010	1:58:12 PM	BCl3 MFC set to  0.000000
10/3/2010	1:58:12 PM	PHl3 MFC set to  0.000000
10/3/2010	1:58:12 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:58:12 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:58:12 PM	Tube furnace set to 0
10/3/2010	1:59:12 PM	Helium valve closed
10/3/2010	1:59:12 PM	H2 valve closed
10/3/2010	1:59:12 PM	BCl3 valve closed
10/3/2010	1:59:12 PM	PH3 valve closed
10/3/2010	1:59:12 PM	SiCl4 pre valve closed
10/3/2010	1:59:12 PM	SiCl4 post valve closed
10/3/2010	1:59:12 PM	Bubbler valve closed
10/3/2010	1:59:12 PM	Main Vac valve opened
10/3/2010	1:59:12 PM	Bypass valve opened
10/3/2010	1:59:12 PM	Helium MFC set to  0.000000
10/3/2010	1:59:12 PM	H2 MFC set to  0.000000
10/3/2010	1:59:12 PM	BCl3 MFC set to  0.000000
10/3/2010	1:59:12 PM	PHl3 MFC set to  0.000000
10/3/2010	1:59:12 PM	SiCl4 MFC set to  0.000000
10/3/2010	1:59:12 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	1:59:12 PM	Tube furnace set to 0
10/3/2010	2:00:12 PM	H2 valve closed
10/3/2010	2:00:12 PM	BCl3 valve closed
10/3/2010	2:00:12 PM	PH3 valve closed
10/3/2010	2:00:12 PM	SiCl4 pre valve closed
10/3/2010	2:00:12 PM	SiCl4 post valve closed
10/3/2010	2:00:12 PM	Bubbler valve closed
10/3/2010	2:00:12 PM	Helium valve opened
10/3/2010	2:00:12 PM	Main Vac valve opened
10/3/2010	2:00:12 PM	Bypass valve opened
10/3/2010	2:00:12 PM	Helium MFC set to  100.000000
10/3/2010	2:00:12 PM	H2 MFC set to  0.000000
10/3/2010	2:00:12 PM	BCl3 MFC set to  0.000000
10/3/2010	2:00:12 PM	PHl3 MFC set to  0.000000
10/3/2010	2:00:12 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:00:12 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:00:12 PM	Tube furnace set to 0
10/3/2010	2:01:12 PM	Helium valve closed
10/3/2010	2:01:12 PM	H2 valve closed
10/3/2010	2:01:12 PM	BCl3 valve closed
10/3/2010	2:01:12 PM	PH3 valve closed
10/3/2010	2:01:12 PM	SiCl4 pre valve closed
10/3/2010	2:01:12 PM	SiCl4 post valve closed
10/3/2010	2:01:12 PM	Bubbler valve closed
10/3/2010	2:01:12 PM	Main Vac valve opened
10/3/2010	2:01:12 PM	Bypass valve opened
10/3/2010	2:01:12 PM	Helium MFC set to  0.000000
10/3/2010	2:01:12 PM	H2 MFC set to  0.000000
10/3/2010	2:01:12 PM	BCl3 MFC set to  0.000000
10/3/2010	2:01:12 PM	PHl3 MFC set to  0.000000
10/3/2010	2:01:12 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:01:12 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:01:12 PM	Tube furnace set to 0
10/3/2010	2:02:13 PM	H2 valve closed
10/3/2010	2:02:13 PM	BCl3 valve closed
10/3/2010	2:02:13 PM	PH3 valve closed
10/3/2010	2:02:13 PM	SiCl4 pre valve closed
10/3/2010	2:02:13 PM	SiCl4 post valve closed
10/3/2010	2:02:13 PM	Bubbler valve closed
10/3/2010	2:02:13 PM	Helium valve opened
10/3/2010	2:02:13 PM	Main Vac valve opened
10/3/2010	2:02:13 PM	Bypass valve opened
10/3/2010	2:02:13 PM	Helium MFC set to  100.000000
10/3/2010	2:02:13 PM	H2 MFC set to  0.000000
10/3/2010	2:02:13 PM	BCl3 MFC set to  0.000000
10/3/2010	2:02:13 PM	PHl3 MFC set to  0.000000
10/3/2010	2:02:13 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:02:13 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:02:13 PM	Tube furnace set to 0
10/3/2010	2:03:13 PM	Helium valve closed
10/3/2010	2:03:13 PM	H2 valve closed
10/3/2010	2:03:13 PM	BCl3 valve closed
10/3/2010	2:03:13 PM	PH3 valve closed
10/3/2010	2:03:13 PM	SiCl4 pre valve closed
10/3/2010	2:03:13 PM	SiCl4 post valve closed
10/3/2010	2:03:13 PM	Bubbler valve closed
10/3/2010	2:03:13 PM	Main Vac valve opened
10/3/2010	2:03:13 PM	Bypass valve opened
10/3/2010	2:03:13 PM	Helium MFC set to  0.000000
10/3/2010	2:03:13 PM	H2 MFC set to  0.000000
10/3/2010	2:03:13 PM	BCl3 MFC set to  0.000000
10/3/2010	2:03:13 PM	PHl3 MFC set to  0.000000
10/3/2010	2:03:13 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:03:13 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:03:13 PM	Tube furnace set to 0
10/3/2010	2:04:13 PM	H2 valve closed
10/3/2010	2:04:13 PM	BCl3 valve closed
10/3/2010	2:04:13 PM	PH3 valve closed
10/3/2010	2:04:13 PM	SiCl4 pre valve closed
10/3/2010	2:04:13 PM	SiCl4 post valve closed
10/3/2010	2:04:13 PM	Bubbler valve closed
10/3/2010	2:04:13 PM	Helium valve opened
10/3/2010	2:04:13 PM	Main Vac valve opened
10/3/2010	2:04:13 PM	Bypass valve opened
10/3/2010	2:04:13 PM	Helium MFC set to  100.000000
10/3/2010	2:04:13 PM	H2 MFC set to  0.000000
10/3/2010	2:04:13 PM	BCl3 MFC set to  0.000000
10/3/2010	2:04:13 PM	PHl3 MFC set to  0.000000
10/3/2010	2:04:13 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:04:13 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:04:13 PM	Tube furnace set to 0
10/3/2010	2:05:13 PM	Helium valve closed
10/3/2010	2:05:13 PM	H2 valve closed
10/3/2010	2:05:13 PM	BCl3 valve closed
10/3/2010	2:05:13 PM	PH3 valve closed
10/3/2010	2:05:13 PM	SiCl4 pre valve closed
10/3/2010	2:05:13 PM	SiCl4 post valve closed
10/3/2010	2:05:13 PM	Bubbler valve closed
10/3/2010	2:05:13 PM	Main Vac valve opened
10/3/2010	2:05:13 PM	Bypass valve opened
10/3/2010	2:05:13 PM	Helium MFC set to  0.000000
10/3/2010	2:05:13 PM	H2 MFC set to  0.000000
10/3/2010	2:05:13 PM	BCl3 MFC set to  0.000000
10/3/2010	2:05:13 PM	PHl3 MFC set to  0.000000
10/3/2010	2:05:13 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:05:13 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:05:13 PM	Tube furnace set to 0
10/3/2010	2:06:13 PM	H2 valve closed
10/3/2010	2:06:13 PM	BCl3 valve closed
10/3/2010	2:06:13 PM	PH3 valve closed
10/3/2010	2:06:13 PM	SiCl4 pre valve closed
10/3/2010	2:06:13 PM	SiCl4 post valve closed
10/3/2010	2:06:13 PM	Bubbler valve closed
10/3/2010	2:06:13 PM	Helium valve opened
10/3/2010	2:06:13 PM	Main Vac valve opened
10/3/2010	2:06:13 PM	Bypass valve opened
10/3/2010	2:06:13 PM	Helium MFC set to  100.000000
10/3/2010	2:06:13 PM	H2 MFC set to  0.000000
10/3/2010	2:06:13 PM	BCl3 MFC set to  0.000000
10/3/2010	2:06:13 PM	PHl3 MFC set to  0.000000
10/3/2010	2:06:13 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:06:13 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:06:14 PM	Tube furnace set to 0
10/3/2010	2:07:14 PM	Helium valve closed
10/3/2010	2:07:14 PM	H2 valve closed
10/3/2010	2:07:14 PM	BCl3 valve closed
10/3/2010	2:07:14 PM	PH3 valve closed
10/3/2010	2:07:14 PM	SiCl4 pre valve closed
10/3/2010	2:07:14 PM	SiCl4 post valve closed
10/3/2010	2:07:14 PM	Bubbler valve closed
10/3/2010	2:07:14 PM	Main Vac valve opened
10/3/2010	2:07:14 PM	Bypass valve opened
10/3/2010	2:07:14 PM	Helium MFC set to  0.000000
10/3/2010	2:07:14 PM	H2 MFC set to  0.000000
10/3/2010	2:07:14 PM	BCl3 MFC set to  0.000000
10/3/2010	2:07:14 PM	PHl3 MFC set to  0.000000
10/3/2010	2:07:14 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:07:14 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:07:14 PM	Tube furnace set to 0
10/3/2010	2:08:14 PM	H2 valve closed
10/3/2010	2:08:14 PM	BCl3 valve closed
10/3/2010	2:08:14 PM	PH3 valve closed
10/3/2010	2:08:14 PM	SiCl4 pre valve closed
10/3/2010	2:08:14 PM	SiCl4 post valve closed
10/3/2010	2:08:14 PM	Bubbler valve closed
10/3/2010	2:08:14 PM	Helium valve opened
10/3/2010	2:08:14 PM	Main Vac valve opened
10/3/2010	2:08:14 PM	Bypass valve opened
10/3/2010	2:08:14 PM	Helium MFC set to  100.000000
10/3/2010	2:08:14 PM	H2 MFC set to  0.000000
10/3/2010	2:08:14 PM	BCl3 MFC set to  0.000000
10/3/2010	2:08:14 PM	PHl3 MFC set to  0.000000
10/3/2010	2:08:14 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:08:14 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:08:14 PM	Tube furnace set to 0
10/3/2010	2:09:14 PM	Helium valve closed
10/3/2010	2:09:14 PM	H2 valve closed
10/3/2010	2:09:14 PM	BCl3 valve closed
10/3/2010	2:09:14 PM	PH3 valve closed
10/3/2010	2:09:14 PM	SiCl4 pre valve closed
10/3/2010	2:09:14 PM	SiCl4 post valve closed
10/3/2010	2:09:14 PM	Bubbler valve closed
10/3/2010	2:09:14 PM	Main Vac valve opened
10/3/2010	2:09:14 PM	Bypass valve opened
10/3/2010	2:09:14 PM	Helium MFC set to  0.000000
10/3/2010	2:09:14 PM	H2 MFC set to  0.000000
10/3/2010	2:09:14 PM	BCl3 MFC set to  0.000000
10/3/2010	2:09:14 PM	PHl3 MFC set to  0.000000
10/3/2010	2:09:14 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:09:14 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:09:14 PM	Tube furnace set to 0
10/3/2010	2:10:14 PM	H2 valve closed
10/3/2010	2:10:14 PM	BCl3 valve closed
10/3/2010	2:10:14 PM	PH3 valve closed
10/3/2010	2:10:14 PM	SiCl4 pre valve closed
10/3/2010	2:10:14 PM	SiCl4 post valve closed
10/3/2010	2:10:14 PM	Bubbler valve closed
10/3/2010	2:10:14 PM	Helium valve opened
10/3/2010	2:10:14 PM	Main Vac valve opened
10/3/2010	2:10:14 PM	Bypass valve opened
10/3/2010	2:10:14 PM	Helium MFC set to  100.000000
10/3/2010	2:10:14 PM	H2 MFC set to  0.000000
10/3/2010	2:10:14 PM	BCl3 MFC set to  0.000000
10/3/2010	2:10:14 PM	PHl3 MFC set to  0.000000
10/3/2010	2:10:14 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:10:14 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:10:14 PM	Tube furnace set to 0
10/3/2010	2:10:30 PM	Run aborted at 2:10 PM
10/3/2010	2:10:30 PM	Helium valve closed
10/3/2010	2:10:30 PM	H2 valve closed
10/3/2010	2:10:30 PM	BCl3 valve closed
10/3/2010	2:10:30 PM	PH3 valve closed
10/3/2010	2:10:30 PM	SiCl4 pre valve closed
10/3/2010	2:10:30 PM	SiCl4 post valve closed
10/3/2010	2:10:30 PM	Bypass valve closed
10/3/2010	2:10:30 PM	Main Vac valve closed
10/3/2010	2:10:30 PM	Bubbler valve closed
10/3/2010	2:10:30 PM	Helium MFC set to  0.000000
10/3/2010	2:10:30 PM	H2 MFC set to  0.000000
10/3/2010	2:10:30 PM	BCl3 MFC set to  0.000000
10/3/2010	2:10:30 PM	PHl3 MFC set to  0.000000
10/3/2010	2:10:30 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:10:30 PM	Tube furnace set to 0
10/3/2010	2:10:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	2:10:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	2:10:45 PM	Recipe started at 2:10 PM
10/3/2010	2:10:45 PM	Helium valve closed
10/3/2010	2:10:45 PM	H2 valve closed
10/3/2010	2:10:45 PM	BCl3 valve closed
10/3/2010	2:10:45 PM	PH3 valve closed
10/3/2010	2:10:45 PM	SiCl4 pre valve closed
10/3/2010	2:10:45 PM	SiCl4 post valve closed
10/3/2010	2:10:45 PM	Main Vac valve closed
10/3/2010	2:10:45 PM	Bubbler valve closed
10/3/2010	2:10:45 PM	Bypass valve opened
10/3/2010	2:10:45 PM	Helium MFC set to  0.000000
10/3/2010	2:10:45 PM	H2 MFC set to  0.000000
10/3/2010	2:10:45 PM	BCl3 MFC set to  0.000000
10/3/2010	2:10:45 PM	PHl3 MFC set to  0.000000
10/3/2010	2:10:45 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:10:45 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:10:45 PM	Tube furnace set to 0
10/3/2010	2:10:46 PM	Helium valve closed
10/3/2010	2:10:46 PM	H2 valve closed
10/3/2010	2:10:46 PM	BCl3 valve closed
10/3/2010	2:10:46 PM	PH3 valve closed
10/3/2010	2:10:46 PM	SiCl4 pre valve closed
10/3/2010	2:10:46 PM	SiCl4 post valve closed
10/3/2010	2:10:46 PM	Bubbler valve closed
10/3/2010	2:10:46 PM	Main Vac valve opened
10/3/2010	2:10:46 PM	Bypass valve opened
10/3/2010	2:10:46 PM	Helium MFC set to  0.000000
10/3/2010	2:10:46 PM	H2 MFC set to  0.000000
10/3/2010	2:10:46 PM	BCl3 MFC set to  0.000000
10/3/2010	2:10:46 PM	PHl3 MFC set to  0.000000
10/3/2010	2:10:46 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:10:46 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:10:46 PM	Tube furnace set to 0
10/3/2010	2:11:46 PM	H2 valve closed
10/3/2010	2:11:46 PM	BCl3 valve closed
10/3/2010	2:11:46 PM	PH3 valve closed
10/3/2010	2:11:46 PM	SiCl4 pre valve closed
10/3/2010	2:11:46 PM	SiCl4 post valve closed
10/3/2010	2:11:46 PM	Bubbler valve closed
10/3/2010	2:11:46 PM	Helium valve opened
10/3/2010	2:11:46 PM	Main Vac valve opened
10/3/2010	2:11:46 PM	Bypass valve opened
10/3/2010	2:11:46 PM	Helium MFC set to  100.000000
10/3/2010	2:11:46 PM	H2 MFC set to  0.000000
10/3/2010	2:11:46 PM	BCl3 MFC set to  0.000000
10/3/2010	2:11:46 PM	PHl3 MFC set to  0.000000
10/3/2010	2:11:46 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:11:46 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:11:46 PM	Tube furnace set to 0
10/3/2010	2:12:46 PM	Helium valve closed
10/3/2010	2:12:46 PM	H2 valve closed
10/3/2010	2:12:46 PM	BCl3 valve closed
10/3/2010	2:12:46 PM	PH3 valve closed
10/3/2010	2:12:46 PM	SiCl4 pre valve closed
10/3/2010	2:12:46 PM	SiCl4 post valve closed
10/3/2010	2:12:46 PM	Bubbler valve closed
10/3/2010	2:12:46 PM	Main Vac valve opened
10/3/2010	2:12:46 PM	Bypass valve opened
10/3/2010	2:12:46 PM	Helium MFC set to  0.000000
10/3/2010	2:12:46 PM	H2 MFC set to  0.000000
10/3/2010	2:12:46 PM	BCl3 MFC set to  0.000000
10/3/2010	2:12:46 PM	PHl3 MFC set to  0.000000
10/3/2010	2:12:46 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:12:46 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:12:46 PM	Tube furnace set to 0
10/3/2010	2:13:46 PM	H2 valve closed
10/3/2010	2:13:46 PM	BCl3 valve closed
10/3/2010	2:13:46 PM	PH3 valve closed
10/3/2010	2:13:46 PM	SiCl4 pre valve closed
10/3/2010	2:13:46 PM	SiCl4 post valve closed
10/3/2010	2:13:46 PM	Bubbler valve closed
10/3/2010	2:13:46 PM	Helium valve opened
10/3/2010	2:13:46 PM	Main Vac valve opened
10/3/2010	2:13:46 PM	Bypass valve opened
10/3/2010	2:13:46 PM	Helium MFC set to  100.000000
10/3/2010	2:13:46 PM	H2 MFC set to  0.000000
10/3/2010	2:13:46 PM	BCl3 MFC set to  0.000000
10/3/2010	2:13:46 PM	PHl3 MFC set to  0.000000
10/3/2010	2:13:46 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:13:46 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:13:46 PM	Tube furnace set to 0
10/3/2010	2:14:46 PM	Helium valve closed
10/3/2010	2:14:46 PM	H2 valve closed
10/3/2010	2:14:46 PM	BCl3 valve closed
10/3/2010	2:14:46 PM	PH3 valve closed
10/3/2010	2:14:46 PM	SiCl4 pre valve closed
10/3/2010	2:14:46 PM	SiCl4 post valve closed
10/3/2010	2:14:46 PM	Bubbler valve closed
10/3/2010	2:14:46 PM	Main Vac valve opened
10/3/2010	2:14:46 PM	Bypass valve opened
10/3/2010	2:14:46 PM	Helium MFC set to  0.000000
10/3/2010	2:14:46 PM	H2 MFC set to  0.000000
10/3/2010	2:14:46 PM	BCl3 MFC set to  0.000000
10/3/2010	2:14:46 PM	PHl3 MFC set to  0.000000
10/3/2010	2:14:46 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:14:46 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:14:47 PM	Tube furnace set to 0
10/3/2010	2:15:47 PM	H2 valve closed
10/3/2010	2:15:47 PM	BCl3 valve closed
10/3/2010	2:15:47 PM	PH3 valve closed
10/3/2010	2:15:47 PM	SiCl4 pre valve closed
10/3/2010	2:15:47 PM	SiCl4 post valve closed
10/3/2010	2:15:47 PM	Bubbler valve closed
10/3/2010	2:15:47 PM	Helium valve opened
10/3/2010	2:15:47 PM	Main Vac valve opened
10/3/2010	2:15:47 PM	Bypass valve opened
10/3/2010	2:15:47 PM	Helium MFC set to  100.000000
10/3/2010	2:15:47 PM	H2 MFC set to  0.000000
10/3/2010	2:15:47 PM	BCl3 MFC set to  0.000000
10/3/2010	2:15:47 PM	PHl3 MFC set to  0.000000
10/3/2010	2:15:47 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:15:47 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:15:47 PM	Tube furnace set to 0
10/3/2010	2:16:47 PM	Helium valve closed
10/3/2010	2:16:47 PM	H2 valve closed
10/3/2010	2:16:47 PM	BCl3 valve closed
10/3/2010	2:16:47 PM	PH3 valve closed
10/3/2010	2:16:47 PM	SiCl4 pre valve closed
10/3/2010	2:16:47 PM	SiCl4 post valve closed
10/3/2010	2:16:47 PM	Bubbler valve closed
10/3/2010	2:16:47 PM	Main Vac valve opened
10/3/2010	2:16:47 PM	Bypass valve opened
10/3/2010	2:16:47 PM	Helium MFC set to  0.000000
10/3/2010	2:16:47 PM	H2 MFC set to  0.000000
10/3/2010	2:16:47 PM	BCl3 MFC set to  0.000000
10/3/2010	2:16:47 PM	PHl3 MFC set to  0.000000
10/3/2010	2:16:47 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:16:47 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:16:47 PM	Tube furnace set to 0
10/3/2010	2:17:47 PM	H2 valve closed
10/3/2010	2:17:47 PM	BCl3 valve closed
10/3/2010	2:17:47 PM	PH3 valve closed
10/3/2010	2:17:47 PM	SiCl4 pre valve closed
10/3/2010	2:17:47 PM	SiCl4 post valve closed
10/3/2010	2:17:47 PM	Bubbler valve closed
10/3/2010	2:17:47 PM	Helium valve opened
10/3/2010	2:17:47 PM	Main Vac valve opened
10/3/2010	2:17:47 PM	Bypass valve opened
10/3/2010	2:17:47 PM	Helium MFC set to  100.000000
10/3/2010	2:17:47 PM	H2 MFC set to  0.000000
10/3/2010	2:17:47 PM	BCl3 MFC set to  0.000000
10/3/2010	2:17:47 PM	PHl3 MFC set to  0.000000
10/3/2010	2:17:47 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:17:47 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:17:47 PM	Tube furnace set to 0
10/3/2010	2:18:47 PM	Helium valve closed
10/3/2010	2:18:47 PM	H2 valve closed
10/3/2010	2:18:47 PM	BCl3 valve closed
10/3/2010	2:18:47 PM	PH3 valve closed
10/3/2010	2:18:47 PM	SiCl4 pre valve closed
10/3/2010	2:18:47 PM	SiCl4 post valve closed
10/3/2010	2:18:47 PM	Bubbler valve closed
10/3/2010	2:18:47 PM	Main Vac valve opened
10/3/2010	2:18:47 PM	Bypass valve opened
10/3/2010	2:18:47 PM	Helium MFC set to  0.000000
10/3/2010	2:18:47 PM	H2 MFC set to  0.000000
10/3/2010	2:18:47 PM	BCl3 MFC set to  0.000000
10/3/2010	2:18:47 PM	PHl3 MFC set to  0.000000
10/3/2010	2:18:47 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:18:47 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:18:47 PM	Tube furnace set to 0
10/3/2010	2:19:47 PM	H2 valve closed
10/3/2010	2:19:47 PM	BCl3 valve closed
10/3/2010	2:19:47 PM	PH3 valve closed
10/3/2010	2:19:47 PM	SiCl4 pre valve closed
10/3/2010	2:19:47 PM	SiCl4 post valve closed
10/3/2010	2:19:47 PM	Bubbler valve closed
10/3/2010	2:19:47 PM	Helium valve opened
10/3/2010	2:19:47 PM	Main Vac valve opened
10/3/2010	2:19:47 PM	Bypass valve opened
10/3/2010	2:19:47 PM	Helium MFC set to  100.000000
10/3/2010	2:19:47 PM	H2 MFC set to  0.000000
10/3/2010	2:19:47 PM	BCl3 MFC set to  0.000000
10/3/2010	2:19:47 PM	PHl3 MFC set to  0.000000
10/3/2010	2:19:47 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:19:47 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:19:48 PM	Tube furnace set to 0
10/3/2010	2:20:48 PM	Helium valve closed
10/3/2010	2:20:48 PM	H2 valve closed
10/3/2010	2:20:48 PM	BCl3 valve closed
10/3/2010	2:20:48 PM	PH3 valve closed
10/3/2010	2:20:48 PM	SiCl4 pre valve closed
10/3/2010	2:20:48 PM	SiCl4 post valve closed
10/3/2010	2:20:48 PM	Bubbler valve closed
10/3/2010	2:20:48 PM	Main Vac valve opened
10/3/2010	2:20:48 PM	Bypass valve opened
10/3/2010	2:20:48 PM	Helium MFC set to  0.000000
10/3/2010	2:20:48 PM	H2 MFC set to  0.000000
10/3/2010	2:20:48 PM	BCl3 MFC set to  0.000000
10/3/2010	2:20:48 PM	PHl3 MFC set to  0.000000
10/3/2010	2:20:48 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:20:48 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:20:48 PM	Tube furnace set to 0
10/3/2010	2:21:48 PM	H2 valve closed
10/3/2010	2:21:48 PM	BCl3 valve closed
10/3/2010	2:21:48 PM	PH3 valve closed
10/3/2010	2:21:48 PM	SiCl4 pre valve closed
10/3/2010	2:21:48 PM	SiCl4 post valve closed
10/3/2010	2:21:48 PM	Bubbler valve closed
10/3/2010	2:21:48 PM	Helium valve opened
10/3/2010	2:21:48 PM	Main Vac valve opened
10/3/2010	2:21:48 PM	Bypass valve opened
10/3/2010	2:21:48 PM	Helium MFC set to  100.000000
10/3/2010	2:21:48 PM	H2 MFC set to  0.000000
10/3/2010	2:21:48 PM	BCl3 MFC set to  0.000000
10/3/2010	2:21:48 PM	PHl3 MFC set to  0.000000
10/3/2010	2:21:48 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:21:48 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:21:48 PM	Tube furnace set to 0
10/3/2010	2:22:48 PM	Helium valve closed
10/3/2010	2:22:48 PM	H2 valve closed
10/3/2010	2:22:48 PM	BCl3 valve closed
10/3/2010	2:22:48 PM	PH3 valve closed
10/3/2010	2:22:48 PM	SiCl4 pre valve closed
10/3/2010	2:22:48 PM	SiCl4 post valve closed
10/3/2010	2:22:48 PM	Bubbler valve closed
10/3/2010	2:22:48 PM	Main Vac valve opened
10/3/2010	2:22:48 PM	Bypass valve opened
10/3/2010	2:22:48 PM	Helium MFC set to  0.000000
10/3/2010	2:22:48 PM	H2 MFC set to  0.000000
10/3/2010	2:22:48 PM	BCl3 MFC set to  0.000000
10/3/2010	2:22:48 PM	PHl3 MFC set to  0.000000
10/3/2010	2:22:48 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:22:48 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:22:48 PM	Tube furnace set to 0
10/3/2010	2:23:48 PM	H2 valve closed
10/3/2010	2:23:48 PM	BCl3 valve closed
10/3/2010	2:23:48 PM	PH3 valve closed
10/3/2010	2:23:48 PM	SiCl4 pre valve closed
10/3/2010	2:23:48 PM	SiCl4 post valve closed
10/3/2010	2:23:48 PM	Bubbler valve closed
10/3/2010	2:23:48 PM	Helium valve opened
10/3/2010	2:23:48 PM	Main Vac valve opened
10/3/2010	2:23:48 PM	Bypass valve opened
10/3/2010	2:23:48 PM	Helium MFC set to  100.000000
10/3/2010	2:23:48 PM	H2 MFC set to  0.000000
10/3/2010	2:23:48 PM	BCl3 MFC set to  0.000000
10/3/2010	2:23:48 PM	PHl3 MFC set to  0.000000
10/3/2010	2:23:48 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:23:48 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:23:48 PM	Tube furnace set to 0
10/3/2010	2:24:48 PM	Helium valve closed
10/3/2010	2:24:48 PM	H2 valve closed
10/3/2010	2:24:48 PM	BCl3 valve closed
10/3/2010	2:24:49 PM	PH3 valve closed
10/3/2010	2:24:49 PM	SiCl4 pre valve closed
10/3/2010	2:24:49 PM	SiCl4 post valve closed
10/3/2010	2:24:49 PM	Bubbler valve closed
10/3/2010	2:24:49 PM	Main Vac valve opened
10/3/2010	2:24:49 PM	Bypass valve opened
10/3/2010	2:24:49 PM	Helium MFC set to  0.000000
10/3/2010	2:24:49 PM	H2 MFC set to  0.000000
10/3/2010	2:24:49 PM	BCl3 MFC set to  0.000000
10/3/2010	2:24:49 PM	PHl3 MFC set to  0.000000
10/3/2010	2:24:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:24:49 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:24:49 PM	Tube furnace set to 0
10/3/2010	2:25:49 PM	H2 valve closed
10/3/2010	2:25:49 PM	BCl3 valve closed
10/3/2010	2:25:49 PM	PH3 valve closed
10/3/2010	2:25:49 PM	SiCl4 pre valve closed
10/3/2010	2:25:49 PM	SiCl4 post valve closed
10/3/2010	2:25:49 PM	Bubbler valve closed
10/3/2010	2:25:49 PM	Helium valve opened
10/3/2010	2:25:49 PM	Main Vac valve opened
10/3/2010	2:25:49 PM	Bypass valve opened
10/3/2010	2:25:49 PM	Helium MFC set to  100.000000
10/3/2010	2:25:49 PM	H2 MFC set to  0.000000
10/3/2010	2:25:49 PM	BCl3 MFC set to  0.000000
10/3/2010	2:25:49 PM	PHl3 MFC set to  0.000000
10/3/2010	2:25:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:25:49 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:25:49 PM	Tube furnace set to 0
10/3/2010	2:26:49 PM	Helium valve closed
10/3/2010	2:26:49 PM	H2 valve closed
10/3/2010	2:26:49 PM	BCl3 valve closed
10/3/2010	2:26:49 PM	PH3 valve closed
10/3/2010	2:26:49 PM	SiCl4 pre valve closed
10/3/2010	2:26:49 PM	SiCl4 post valve closed
10/3/2010	2:26:49 PM	Bubbler valve closed
10/3/2010	2:26:49 PM	Main Vac valve opened
10/3/2010	2:26:49 PM	Bypass valve opened
10/3/2010	2:26:49 PM	Helium MFC set to  0.000000
10/3/2010	2:26:49 PM	H2 MFC set to  0.000000
10/3/2010	2:26:49 PM	BCl3 MFC set to  0.000000
10/3/2010	2:26:49 PM	PHl3 MFC set to  0.000000
10/3/2010	2:26:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:26:49 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:26:49 PM	Tube furnace set to 0
10/3/2010	2:27:49 PM	H2 valve closed
10/3/2010	2:27:49 PM	BCl3 valve closed
10/3/2010	2:27:49 PM	PH3 valve closed
10/3/2010	2:27:49 PM	SiCl4 pre valve closed
10/3/2010	2:27:49 PM	SiCl4 post valve closed
10/3/2010	2:27:49 PM	Bubbler valve closed
10/3/2010	2:27:49 PM	Helium valve opened
10/3/2010	2:27:49 PM	Main Vac valve opened
10/3/2010	2:27:49 PM	Bypass valve opened
10/3/2010	2:27:49 PM	Helium MFC set to  100.000000
10/3/2010	2:27:49 PM	H2 MFC set to  0.000000
10/3/2010	2:27:49 PM	BCl3 MFC set to  0.000000
10/3/2010	2:27:49 PM	PHl3 MFC set to  0.000000
10/3/2010	2:27:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:27:49 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:27:49 PM	Tube furnace set to 0
10/3/2010	2:28:49 PM	Helium valve closed
10/3/2010	2:28:49 PM	H2 valve closed
10/3/2010	2:28:49 PM	BCl3 valve closed
10/3/2010	2:28:49 PM	PH3 valve closed
10/3/2010	2:28:49 PM	SiCl4 pre valve closed
10/3/2010	2:28:49 PM	SiCl4 post valve closed
10/3/2010	2:28:49 PM	Bubbler valve closed
10/3/2010	2:28:49 PM	Main Vac valve opened
10/3/2010	2:28:49 PM	Bypass valve opened
10/3/2010	2:28:49 PM	Helium MFC set to  0.000000
10/3/2010	2:28:49 PM	H2 MFC set to  0.000000
10/3/2010	2:28:49 PM	BCl3 MFC set to  0.000000
10/3/2010	2:28:49 PM	PHl3 MFC set to  0.000000
10/3/2010	2:28:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:28:49 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:28:50 PM	Tube furnace set to 0
10/3/2010	2:29:50 PM	H2 valve closed
10/3/2010	2:29:50 PM	BCl3 valve closed
10/3/2010	2:29:50 PM	PH3 valve closed
10/3/2010	2:29:50 PM	SiCl4 pre valve closed
10/3/2010	2:29:50 PM	SiCl4 post valve closed
10/3/2010	2:29:50 PM	Bubbler valve closed
10/3/2010	2:29:50 PM	Helium valve opened
10/3/2010	2:29:50 PM	Main Vac valve opened
10/3/2010	2:29:50 PM	Bypass valve opened
10/3/2010	2:29:50 PM	Helium MFC set to  100.000000
10/3/2010	2:29:50 PM	H2 MFC set to  0.000000
10/3/2010	2:29:50 PM	BCl3 MFC set to  0.000000
10/3/2010	2:29:50 PM	PHl3 MFC set to  0.000000
10/3/2010	2:29:50 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:29:50 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:29:50 PM	Tube furnace set to 0
10/3/2010	2:30:50 PM	Helium valve closed
10/3/2010	2:30:50 PM	H2 valve closed
10/3/2010	2:30:50 PM	BCl3 valve closed
10/3/2010	2:30:50 PM	PH3 valve closed
10/3/2010	2:30:50 PM	SiCl4 pre valve closed
10/3/2010	2:30:50 PM	SiCl4 post valve closed
10/3/2010	2:30:50 PM	Bubbler valve closed
10/3/2010	2:30:50 PM	Main Vac valve opened
10/3/2010	2:30:50 PM	Bypass valve opened
10/3/2010	2:30:50 PM	Helium MFC set to  0.000000
10/3/2010	2:30:50 PM	H2 MFC set to  0.000000
10/3/2010	2:30:50 PM	BCl3 MFC set to  0.000000
10/3/2010	2:30:50 PM	PHl3 MFC set to  0.000000
10/3/2010	2:30:50 PM	SiCl4 MFC set to  0.000000
10/3/2010	2:30:50 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	2:30:50 PM	Tube furnace set to 0
10/3/2010	2:30:51 PM	Run finished at 2:30 PM
10/3/2010	2:30:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	3:47:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	3:47:24 PM	Recipe started at 3:47 PM
10/3/2010	3:47:24 PM	Helium valve closed
10/3/2010	3:47:24 PM	H2 valve closed
10/3/2010	3:47:24 PM	BCl3 valve closed
10/3/2010	3:47:24 PM	PH3 valve closed
10/3/2010	3:47:24 PM	SiCl4 pre valve closed
10/3/2010	3:47:24 PM	SiCl4 post valve closed
10/3/2010	3:47:24 PM	Main Vac valve closed
10/3/2010	3:47:24 PM	Bubbler valve closed
10/3/2010	3:47:24 PM	Bypass valve opened
10/3/2010	3:47:24 PM	Helium MFC set to  0.000000
10/3/2010	3:47:24 PM	H2 MFC set to  0.000000
10/3/2010	3:47:24 PM	BCl3 MFC set to  0.000000
10/3/2010	3:47:24 PM	PHl3 MFC set to  0.000000
10/3/2010	3:47:24 PM	SiCl4 MFC set to  0.000000
10/3/2010	3:47:24 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	3:47:24 PM	Tube furnace set to 0
10/3/2010	3:47:25 PM	Run aborted at 3:47 PM
10/3/2010	3:47:25 PM	Helium valve closed
10/3/2010	3:47:25 PM	H2 valve closed
10/3/2010	3:47:25 PM	BCl3 valve closed
10/3/2010	3:47:25 PM	PH3 valve closed
10/3/2010	3:47:25 PM	SiCl4 pre valve closed
10/3/2010	3:47:25 PM	SiCl4 post valve closed
10/3/2010	3:47:25 PM	Bypass valve closed
10/3/2010	3:47:25 PM	Main Vac valve closed
10/3/2010	3:47:25 PM	Bubbler valve closed
10/3/2010	3:47:25 PM	Helium MFC set to  0.000000
10/3/2010	3:47:25 PM	H2 MFC set to  0.000000
10/3/2010	3:47:25 PM	BCl3 MFC set to  0.000000
10/3/2010	3:47:25 PM	PHl3 MFC set to  0.000000
10/3/2010	3:47:25 PM	SiCl4 MFC set to  0.000000
10/3/2010	3:47:25 PM	Tube furnace set to 0
10/3/2010	3:47:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/3/2010	3:47:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	3:47:27 PM	Recipe started at 3:47 PM
10/3/2010	3:47:27 PM	Helium valve closed
10/3/2010	3:47:27 PM	H2 valve closed
10/3/2010	3:47:27 PM	BCl3 valve closed
10/3/2010	3:47:27 PM	PH3 valve closed
10/3/2010	3:47:27 PM	SiCl4 pre valve closed
10/3/2010	3:47:27 PM	SiCl4 post valve closed
10/3/2010	3:47:27 PM	Main Vac valve closed
10/3/2010	3:47:27 PM	Bubbler valve closed
10/3/2010	3:47:27 PM	Bypass valve opened
10/3/2010	3:47:27 PM	Helium MFC set to  0.000000
10/3/2010	3:47:27 PM	H2 MFC set to  0.000000
10/3/2010	3:47:27 PM	BCl3 MFC set to  0.000000
10/3/2010	3:47:27 PM	PHl3 MFC set to  0.000000
10/3/2010	3:47:27 PM	SiCl4 MFC set to  0.000000
10/3/2010	3:47:27 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	3:47:27 PM	Tube furnace set to 0
10/3/2010	3:47:28 PM	Helium valve closed
10/3/2010	3:47:28 PM	H2 valve closed
10/3/2010	3:47:28 PM	BCl3 valve closed
10/3/2010	3:47:28 PM	PH3 valve closed
10/3/2010	3:47:28 PM	SiCl4 pre valve closed
10/3/2010	3:47:28 PM	SiCl4 post valve closed
10/3/2010	3:47:28 PM	Bubbler valve closed
10/3/2010	3:47:28 PM	Main Vac valve opened
10/3/2010	3:47:28 PM	Bypass valve opened
10/3/2010	3:47:28 PM	Helium MFC set to  0.000000
10/3/2010	3:47:28 PM	H2 MFC set to  0.000000
10/3/2010	3:47:28 PM	BCl3 MFC set to  0.000000
10/3/2010	3:47:28 PM	PHl3 MFC set to  0.000000
10/3/2010	3:47:28 PM	SiCl4 MFC set to  0.000000
10/3/2010	3:47:28 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	3:47:28 PM	Tube furnace set to 0
10/3/2010	3:47:28 PM	Run finished at 3:47 PM
10/3/2010	3:47:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	3:47:31 PM	Helium MFC set to  100.000000
10/3/2010	3:47:33 PM	Helium valve opened
10/3/2010	4:36:12 PM	Helium valve closed
10/3/2010	4:36:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	4:36:14 PM	Recipe started at 4:36 PM
10/3/2010	4:36:14 PM	Helium valve closed
10/3/2010	4:36:14 PM	H2 valve closed
10/3/2010	4:36:14 PM	BCl3 valve closed
10/3/2010	4:36:14 PM	PH3 valve closed
10/3/2010	4:36:14 PM	SiCl4 pre valve closed
10/3/2010	4:36:14 PM	SiCl4 post valve closed
10/3/2010	4:36:14 PM	Main Vac valve closed
10/3/2010	4:36:14 PM	Bubbler valve closed
10/3/2010	4:36:14 PM	Bypass valve opened
10/3/2010	4:36:14 PM	Helium MFC set to  0.000000
10/3/2010	4:36:14 PM	H2 MFC set to  0.000000
10/3/2010	4:36:14 PM	BCl3 MFC set to  0.000000
10/3/2010	4:36:14 PM	PHl3 MFC set to  0.000000
10/3/2010	4:36:14 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:36:14 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:36:14 PM	Tube furnace set to 0
10/3/2010	4:36:15 PM	Helium valve closed
10/3/2010	4:36:15 PM	H2 valve closed
10/3/2010	4:36:15 PM	BCl3 valve closed
10/3/2010	4:36:15 PM	PH3 valve closed
10/3/2010	4:36:15 PM	SiCl4 pre valve closed
10/3/2010	4:36:15 PM	SiCl4 post valve closed
10/3/2010	4:36:15 PM	Bubbler valve closed
10/3/2010	4:36:15 PM	Main Vac valve opened
10/3/2010	4:36:15 PM	Bypass valve opened
10/3/2010	4:36:15 PM	Helium MFC set to  0.000000
10/3/2010	4:36:15 PM	H2 MFC set to  0.000000
10/3/2010	4:36:15 PM	BCl3 MFC set to  0.000000
10/3/2010	4:36:15 PM	PHl3 MFC set to  0.000000
10/3/2010	4:36:15 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:36:15 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:36:15 PM	Tube furnace set to 0
10/3/2010	4:36:15 PM	Run finished at 4:36 PM
10/3/2010	4:36:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	4:37:02 PM	Recipe started at 4:37 PM
10/3/2010	4:37:02 PM	Helium valve closed
10/3/2010	4:37:02 PM	BCl3 valve closed
10/3/2010	4:37:02 PM	PH3 valve closed
10/3/2010	4:37:02 PM	SiCl4 pre valve closed
10/3/2010	4:37:02 PM	SiCl4 post valve closed
10/3/2010	4:37:02 PM	Main Vac valve closed
10/3/2010	4:37:02 PM	Bypass valve closed
10/3/2010	4:37:02 PM	Bubbler valve closed
10/3/2010	4:37:02 PM	H2 valve opened
10/3/2010	4:37:02 PM	Helium MFC set to  0.000000
10/3/2010	4:37:02 PM	H2 MFC set to  500.000000
10/3/2010	4:37:02 PM	BCl3 MFC set to  0.000000
10/3/2010	4:37:02 PM	PHl3 MFC set to  0.000000
10/3/2010	4:37:02 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:37:02 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:37:02 PM	Tube furnace set to 1000
10/3/2010	4:38:22 PM	Helium valve closed
10/3/2010	4:38:22 PM	BCl3 valve closed
10/3/2010	4:38:22 PM	PH3 valve closed
10/3/2010	4:38:22 PM	SiCl4 pre valve closed
10/3/2010	4:38:22 PM	SiCl4 post valve closed
10/3/2010	4:38:22 PM	Main Vac valve closed
10/3/2010	4:38:22 PM	Bypass valve closed
10/3/2010	4:38:22 PM	H2 valve opened
10/3/2010	4:38:22 PM	Bubbler valve opened
10/3/2010	4:38:22 PM	Helium MFC set to  0.000000
10/3/2010	4:38:22 PM	H2 MFC set to  500.000000
10/3/2010	4:38:22 PM	BCl3 MFC set to  0.000000
10/3/2010	4:38:22 PM	PHl3 MFC set to  0.000000
10/3/2010	4:38:22 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:38:22 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:38:23 PM	Tube furnace set to 1000
10/3/2010	4:39:48 PM	Helium valve closed
10/3/2010	4:39:48 PM	H2 valve closed
10/3/2010	4:39:48 PM	BCl3 valve closed
10/3/2010	4:39:48 PM	PH3 valve closed
10/3/2010	4:39:48 PM	SiCl4 pre valve closed
10/3/2010	4:39:48 PM	SiCl4 post valve closed
10/3/2010	4:39:49 PM	Main Vac valve closed
10/3/2010	4:39:49 PM	Bubbler valve closed
10/3/2010	4:39:49 PM	Bypass valve closed
10/3/2010	4:39:49 PM	Helium MFC set to  0.000000
10/3/2010	4:39:49 PM	H2 MFC set to  0.000000
10/3/2010	4:39:49 PM	BCl3 MFC set to  0.000000
10/3/2010	4:39:49 PM	PHl3 MFC set to  0.000000
10/3/2010	4:39:49 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:39:49 PM	Bypass solenoid MFC set to  760.000000
10/3/2010	4:39:49 PM	Tube furnace set to 0
10/3/2010	4:39:49 PM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
10/3/2010	4:39:58 PM	Run aborted at 4:39 PM
10/3/2010	4:42:06 PM	Recipe started at 4:42 PM
10/3/2010	4:42:06 PM	Helium valve closed
10/3/2010	4:42:06 PM	BCl3 valve closed
10/3/2010	4:42:06 PM	PH3 valve closed
10/3/2010	4:42:06 PM	SiCl4 pre valve closed
10/3/2010	4:42:06 PM	SiCl4 post valve closed
10/3/2010	4:42:06 PM	Main Vac valve closed
10/3/2010	4:42:06 PM	Bypass valve closed
10/3/2010	4:42:06 PM	Bubbler valve closed
10/3/2010	4:42:06 PM	H2 valve opened
10/3/2010	4:42:06 PM	Helium MFC set to  0.000000
10/3/2010	4:42:06 PM	H2 MFC set to  500.000000
10/3/2010	4:42:06 PM	BCl3 MFC set to  0.000000
10/3/2010	4:42:06 PM	PHl3 MFC set to  0.000000
10/3/2010	4:42:06 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:42:06 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:42:06 PM	Tube furnace set to 1000
10/3/2010	4:42:08 PM	Helium valve closed
10/3/2010	4:42:08 PM	BCl3 valve closed
10/3/2010	4:42:08 PM	PH3 valve closed
10/3/2010	4:42:08 PM	SiCl4 pre valve closed
10/3/2010	4:42:08 PM	SiCl4 post valve closed
10/3/2010	4:42:08 PM	Main Vac valve closed
10/3/2010	4:42:08 PM	Bypass valve closed
10/3/2010	4:42:08 PM	H2 valve opened
10/3/2010	4:42:08 PM	Bubbler valve opened
10/3/2010	4:42:08 PM	Helium MFC set to  0.000000
10/3/2010	4:42:08 PM	H2 MFC set to  500.000000
10/3/2010	4:42:08 PM	BCl3 MFC set to  0.000000
10/3/2010	4:42:08 PM	PHl3 MFC set to  0.000000
10/3/2010	4:42:08 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:42:08 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:42:08 PM	Tube furnace set to 1000
10/3/2010	4:43:37 PM	Helium valve closed
10/3/2010	4:43:37 PM	H2 valve closed
10/3/2010	4:43:37 PM	BCl3 valve closed
10/3/2010	4:43:37 PM	PH3 valve closed
10/3/2010	4:43:37 PM	SiCl4 pre valve closed
10/3/2010	4:43:37 PM	SiCl4 post valve closed
10/3/2010	4:43:37 PM	Main Vac valve closed
10/3/2010	4:43:37 PM	Bubbler valve closed
10/3/2010	4:43:37 PM	Bypass valve closed
10/3/2010	4:43:37 PM	Helium MFC set to  0.000000
10/3/2010	4:43:37 PM	H2 MFC set to  0.000000
10/3/2010	4:43:37 PM	BCl3 MFC set to  0.000000
10/3/2010	4:43:37 PM	PHl3 MFC set to  0.000000
10/3/2010	4:43:37 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:43:37 PM	Bypass solenoid MFC set to  760.000000
10/3/2010	4:43:37 PM	Tube furnace set to 0
10/3/2010	4:43:37 PM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
10/3/2010	4:43:43 PM	Run aborted at 4:43 PM
10/3/2010	4:43:50 PM	Recipe started at 4:43 PM
10/3/2010	4:43:50 PM	Helium valve closed
10/3/2010	4:43:50 PM	BCl3 valve closed
10/3/2010	4:43:50 PM	PH3 valve closed
10/3/2010	4:43:50 PM	SiCl4 pre valve closed
10/3/2010	4:43:50 PM	SiCl4 post valve closed
10/3/2010	4:43:50 PM	Main Vac valve closed
10/3/2010	4:43:50 PM	Bypass valve closed
10/3/2010	4:43:50 PM	Bubbler valve closed
10/3/2010	4:43:50 PM	H2 valve opened
10/3/2010	4:43:50 PM	Helium MFC set to  0.000000
10/3/2010	4:43:50 PM	H2 MFC set to  500.000000
10/3/2010	4:43:50 PM	BCl3 MFC set to  0.000000
10/3/2010	4:43:50 PM	PHl3 MFC set to  0.000000
10/3/2010	4:43:50 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:43:50 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:43:50 PM	Tube furnace set to 1000
10/3/2010	4:43:53 PM	Helium valve closed
10/3/2010	4:43:53 PM	BCl3 valve closed
10/3/2010	4:43:53 PM	PH3 valve closed
10/3/2010	4:43:53 PM	SiCl4 pre valve closed
10/3/2010	4:43:53 PM	SiCl4 post valve closed
10/3/2010	4:43:53 PM	Main Vac valve closed
10/3/2010	4:43:53 PM	Bypass valve closed
10/3/2010	4:43:53 PM	H2 valve opened
10/3/2010	4:43:53 PM	Bubbler valve opened
10/3/2010	4:43:53 PM	Helium MFC set to  0.000000
10/3/2010	4:43:53 PM	H2 MFC set to  500.000000
10/3/2010	4:43:53 PM	BCl3 MFC set to  0.000000
10/3/2010	4:43:53 PM	PHl3 MFC set to  0.000000
10/3/2010	4:43:53 PM	SiCl4 MFC set to  0.000000
10/3/2010	4:43:53 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	4:43:53 PM	Tube furnace set to 1000
10/3/2010	5:03:53 PM	Helium valve closed
10/3/2010	5:03:53 PM	PH3 valve closed
10/3/2010	5:03:53 PM	Main Vac valve closed
10/3/2010	5:03:53 PM	Bypass valve closed
10/3/2010	5:03:53 PM	H2 valve opened
10/3/2010	5:03:53 PM	BCl3 valve opened
10/3/2010	5:03:54 PM	SiCl4 pre valve opened
10/3/2010	5:03:54 PM	SiCl4 post valve opened
10/3/2010	5:03:54 PM	Bubbler valve opened
10/3/2010	5:03:54 PM	Helium MFC set to  0.000000
10/3/2010	5:03:54 PM	H2 MFC set to  500.000000
10/3/2010	5:03:54 PM	BCl3 MFC set to  10.000000
10/3/2010	5:03:54 PM	PHl3 MFC set to  0.000000
10/3/2010	5:03:54 PM	SiCl4 MFC set to  50.000000
10/3/2010	5:03:54 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	5:03:54 PM	Tube furnace set to 1000
10/3/2010	5:15:54 PM	Helium valve closed
10/3/2010	5:15:54 PM	BCl3 valve closed
10/3/2010	5:15:54 PM	PH3 valve closed
10/3/2010	5:15:54 PM	SiCl4 pre valve closed
10/3/2010	5:15:54 PM	SiCl4 post valve closed
10/3/2010	5:15:54 PM	Main Vac valve closed
10/3/2010	5:15:54 PM	Bypass valve closed
10/3/2010	5:15:54 PM	H2 valve opened
10/3/2010	5:15:54 PM	Bubbler valve opened
10/3/2010	5:15:54 PM	Helium MFC set to  0.000000
10/3/2010	5:15:54 PM	H2 MFC set to  500.000000
10/3/2010	5:15:54 PM	BCl3 MFC set to  0.000000
10/3/2010	5:15:54 PM	PHl3 MFC set to  0.000000
10/3/2010	5:15:54 PM	SiCl4 MFC set to  0.000000
10/3/2010	5:15:54 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	5:15:54 PM	Tube furnace set to 750
10/3/2010	5:35:54 PM	H2 valve closed
10/3/2010	5:35:54 PM	BCl3 valve closed
10/3/2010	5:35:54 PM	PH3 valve closed
10/3/2010	5:35:54 PM	SiCl4 pre valve closed
10/3/2010	5:35:54 PM	SiCl4 post valve closed
10/3/2010	5:35:54 PM	Main Vac valve closed
10/3/2010	5:35:54 PM	Bypass valve closed
10/3/2010	5:35:54 PM	Helium valve opened
10/3/2010	5:35:54 PM	Bubbler valve opened
10/3/2010	5:35:54 PM	Helium MFC set to  500.000000
10/3/2010	5:35:54 PM	H2 MFC set to  0.000000
10/3/2010	5:35:54 PM	BCl3 MFC set to  0.000000
10/3/2010	5:35:54 PM	PHl3 MFC set to  0.000000
10/3/2010	5:35:54 PM	SiCl4 MFC set to  0.000000
10/3/2010	5:35:54 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	5:35:54 PM	Tube furnace set to 0
10/3/2010	5:55:54 PM	Helium valve closed
10/3/2010	5:55:54 PM	H2 valve closed
10/3/2010	5:55:54 PM	BCl3 valve closed
10/3/2010	5:55:54 PM	PH3 valve closed
10/3/2010	5:55:54 PM	SiCl4 pre valve closed
10/3/2010	5:55:54 PM	SiCl4 post valve closed
10/3/2010	5:55:54 PM	Main Vac valve closed
10/3/2010	5:55:54 PM	Bypass valve closed
10/3/2010	5:55:54 PM	Bubbler valve closed
10/3/2010	5:55:54 PM	Helium MFC set to  0.000000
10/3/2010	5:55:54 PM	H2 MFC set to  0.000000
10/3/2010	5:55:54 PM	BCl3 MFC set to  0.000000
10/3/2010	5:55:54 PM	PHl3 MFC set to  0.000000
10/3/2010	5:55:54 PM	SiCl4 MFC set to  0.000000
10/3/2010	5:55:54 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	5:55:54 PM	Tube furnace set to 0
10/3/2010	5:55:54 PM	Run finished at 5:55 PM
10/3/2010	6:20:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2010	6:20:36 PM	Recipe started at 6:20 PM
10/3/2010	6:20:36 PM	H2 valve closed
10/3/2010	6:20:36 PM	BCl3 valve closed
10/3/2010	6:20:36 PM	PH3 valve closed
10/3/2010	6:20:36 PM	SiCl4 pre valve closed
10/3/2010	6:20:36 PM	SiCl4 post valve closed
10/3/2010	6:20:36 PM	Main Vac valve closed
10/3/2010	6:20:36 PM	Bypass valve closed
10/3/2010	6:20:36 PM	Bubbler valve closed
10/3/2010	6:20:36 PM	Helium valve opened
10/3/2010	6:20:36 PM	Helium MFC set to  500.000000
10/3/2010	6:20:36 PM	H2 MFC set to  0.000000
10/3/2010	6:20:36 PM	BCl3 MFC set to  0.000000
10/3/2010	6:20:36 PM	PHl3 MFC set to  0.000000
10/3/2010	6:20:36 PM	SiCl4 MFC set to  0.000000
10/3/2010	6:20:36 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	6:20:37 PM	Tube furnace set to 0
10/3/2010	6:20:39 PM	Helium valve closed
10/3/2010	6:20:39 PM	H2 valve closed
10/3/2010	6:20:39 PM	BCl3 valve closed
10/3/2010	6:20:39 PM	PH3 valve closed
10/3/2010	6:20:39 PM	SiCl4 pre valve closed
10/3/2010	6:20:39 PM	SiCl4 post valve closed
10/3/2010	6:20:39 PM	Main Vac valve closed
10/3/2010	6:20:39 PM	Bypass valve closed
10/3/2010	6:20:39 PM	Bubbler valve closed
10/3/2010	6:20:39 PM	Helium MFC set to  0.000000
10/3/2010	6:20:39 PM	H2 MFC set to  0.000000
10/3/2010	6:20:39 PM	BCl3 MFC set to  0.000000
10/3/2010	6:20:39 PM	PHl3 MFC set to  0.000000
10/3/2010	6:20:39 PM	SiCl4 MFC set to  0.000000
10/3/2010	6:20:39 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	6:20:39 PM	Tube furnace set to 0
10/3/2010	6:20:39 PM	Run finished at 6:20 PM
10/3/2010	6:20:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2010	6:22:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2010	6:22:53 PM	Recipe started at 6:22 PM
10/3/2010	6:22:53 PM	Helium valve closed
10/3/2010	6:22:53 PM	H2 valve closed
10/3/2010	6:22:53 PM	BCl3 valve closed
10/3/2010	6:22:53 PM	PH3 valve closed
10/3/2010	6:22:53 PM	SiCl4 pre valve closed
10/3/2010	6:22:53 PM	SiCl4 post valve closed
10/3/2010	6:22:53 PM	Main Vac valve closed
10/3/2010	6:22:53 PM	Bubbler valve closed
10/3/2010	6:22:53 PM	Bypass valve opened
10/3/2010	6:22:53 PM	Helium MFC set to  0.000000
10/3/2010	6:22:53 PM	H2 MFC set to  0.000000
10/3/2010	6:22:54 PM	BCl3 MFC set to  0.000000
10/3/2010	6:22:54 PM	PHl3 MFC set to  0.000000
10/3/2010	6:22:54 PM	SiCl4 MFC set to  0.000000
10/3/2010	6:22:54 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	6:22:54 PM	Tube furnace set to 0
10/3/2010	6:23:39 PM	Helium valve closed
10/3/2010	6:23:39 PM	H2 valve closed
10/3/2010	6:23:39 PM	BCl3 valve closed
10/3/2010	6:23:39 PM	PH3 valve closed
10/3/2010	6:23:39 PM	SiCl4 pre valve closed
10/3/2010	6:23:39 PM	SiCl4 post valve closed
10/3/2010	6:23:39 PM	Bubbler valve closed
10/3/2010	6:23:39 PM	Main Vac valve opened
10/3/2010	6:23:39 PM	Bypass valve opened
10/3/2010	6:23:39 PM	Helium MFC set to  0.000000
10/3/2010	6:23:39 PM	H2 MFC set to  0.000000
10/3/2010	6:23:39 PM	BCl3 MFC set to  0.000000
10/3/2010	6:23:39 PM	PHl3 MFC set to  0.000000
10/3/2010	6:23:39 PM	SiCl4 MFC set to  0.000000
10/3/2010	6:23:39 PM	Bypass solenoid MFC set to  0.000000
10/3/2010	6:23:39 PM	Tube furnace set to 0
10/3/2010	6:23:40 PM	Run finished at 6:23 PM
10/3/2010	6:23:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
